Nanomotion Stages for Semiconductor Equipment Can Now Achieve Sub-Nanometer Stability – PR.com

Ronkonkoma,
NY,
January
26,
2025
–(PR.com)– Nanomotion,
a
Johnson
Electric
Company,
has
developed
the
next
level
of
precision
motion
systems
for
motion
control
in
semiconductor
production
and
metrology
equipment.
Nanomotion
has
invested
in
the
infrastructure
to
build
and
test
their
stages,
demonstrating
sub-nanometer
position
stability,
below
0.25nm.
A
state-of-the-art
clean
room,
isolated
from
environmental
vibrations
and
acoustical
noise
supports
the
ability
to
demonstrate
the
utmost
in
motion
performance.

Alan
Feinstein,
president
of
Nanomotion,
states,
“Precision
stages
offer
semiconductor
a
performance
advantage
for
next-gen
tools.
I’m
proud
of
our
design
and
manufacturing
capabilities
and
in
our
investment
in
the
infrastructure
required
to
manufacture
and
test
these
with
the
rigor
required
by
this
industry.”

Next-generation
tools
are
required
to
meet
the
precision,
complexity
and
yield
demands
of
the
semiconductor
market.
Preciion
motion
systems
to
support
these
new
systems
must:

·
Function
at
ultra-high
resolution
·
Free
of
organic
contaminants
that
may
cause
outgassing
·
Maintain
a
stable
position
under
vibration
and
temperature
fluctuations.

Nanomotion’s
precision
motion
systems
have
demonstrated
such
an
advantage.
These
stages
are
used
in
mask
and
wafer
manufacturing,
including
pattern
generation
for
masks
and
reticles,
wafer
and
mask
metrology,
defect
inspection
and
verification
and
mask
repair.

Nanomotion’s
motion
systems
have
been
proven
under
the
most
stringent
requirements,
with
tens
of
thousands
in
operation
in
the
semiconductor
industry
today.
Under
even
more
demanding
conditions,
Nanomotion
submicron
stages
have
been
deployed
in
some
of
the
most
challenging
environments,
with
stringent
standards
for
outgassing
and
runtime,
running
on
satellites
specified
for
150M
cycles.

Named
as
a
2023
Top
10
Semiconductor
Manufacturing
solution
provider
of
the
year,
Nanomotion
offers
OEM-ready
stages
for
next-generation
semiconductor
tools.
Learn
more
at

https://www.nanomotion.com/product-category/industry-solutions-products/semiconductor/.

About
Nanomotion
Nanomotion,
a
leader
in
advanced
motion
systems
and
subsystem
modules,
is
a
subsidiary
of
Johnson
Electric.
With
a
diverse
product
portfolio
that
includes
motors,
drivers,
controllers,
standard
and
custom
stages,
Nanomotion
serves
market
leaders
in
critical
industries
such
as
optronics,
biomedical
and
semiconductors.
Headquartered
in
Yokne’am
Illit,
Israel,
with
an
additional
office
in
Ronkonkoma,
New
York,
the
company
has
been
at
the
forefront
of
providing
high-precision
and
reliable
motion
control
solutions
since
its
founding
in
1992.
Nanomotion
remains
committed
to
advancing
the
field
of
motion
systems
and
delivering
unparalleled
performance
for
its
customers.